Thermo Chuck

Thermo Chuck

Best solution for multisite measurements Optimal for High-temperature measurement such as TDDB, EM

APW hot chuck is configured by high uniformity hot plate and temperature controller. It enables the high thermo-control accuracy and temperature distribution. There are less heat strain, but optimal for malti probing as used the ceramic for chuck top.
Combination with α-series manual probe station enables high temperature measurement and low noise probing. We also offer any idea for embarkation the hot chuck with customer’s probe station.

Standard temperature range:-40 deg.C ~ +120deg.C
Compatible with APW a-series probe station For the test environment requiring negative up to high temperature control.

Example 1

alfa_200Combination with manual probe station
for 12inch TDDB measurement.

 

 

 

Example 2

Thermo Chuck5Mounted to LCD probe station

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